Fabrication ofPb(Zr,Ti)O 3 ThinFilms by LiquidDelivery MOCVD Usinga Cocktail Sourcewith Pb(METHD) 2 ,Zr(METHD) 4 andTi(MPD)(METHD) 2 Yohei OtaniNorikazu AbeYoshiki Ueda2003 год

Fabrication of Pb(Zr,Ti)O 3 Thin Films by Liquid Delivery MOCVD Using a Cocktail Source with Pb(METHD) 2 , Zr(METHD) 4 and Ti(MPD)(METHD) 2
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