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A Fully IntegratedOven ControlledMicroelectromechanical Oscillator—Part I:Design andFabrication Kenneth E. WojciechowskiMichael BakerPeggy J. Clews2015 год

A Fully Integrated Oven Controlled Microelectromechanical Oscillator—Part I: Design and Fabrication
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Аннотация: This paper, the first of two parts, reports the design and fabrication of a fully integrated oven controlled microelectromechanical oscillator (OCMO). This paper begins by describing the limits on oscillator frequency stability imposed by the thermal drift and electronic properties (Q, resistance) of both the resonant tank circuit and feedback electronics required to form an electronic oscillator. An OCMO is presented that takes advantage of high thermal isolation and monolithic integration of both micromechanical resonators and electronic circuitry to thermally stabilize or ovenize all the components that comprise an oscillator. This was achieved by developing a processing technique where both silicon-on-insulator complementary metal-oxide-semiconductor (CMOS) circuitry and piezoelectric aluminum nitride, AlN, micromechanical resonators are placed on a suspended platform within a standard CMOS integrated circuit. Operation at microscale sizes achieves high thermal resistances (~10 °C/mW), and hence thermal stabilization of the oscillators at very low-power levels when compared with the state-of-the-art ovenized crystal oscillators, OCXO. A constant resistance feedback circuit is presented that incorporates on platform resistive heaters and temperature sensors to both measure and stabilize the platform temperature. The limits on temperature stability of the OCMO platform and oscillator frequency imposed by the gain of the constant resistance feedback loop, placement of the heater and temperature sensing resistors, as well as platform radiative and convective heat losses are investigated.
Год издания: 2015
Авторы: Kenneth E. Wojciechowski, Michael Baker, Peggy J. Clews, Roy H. Olsson
Издательство: Institute of Electrical and Electronics Engineers
Источник: Journal of Microelectromechanical Systems
Ключевые слова: Acoustic Wave Resonator Technologies, Mechanical and Optical Resonators, Advanced MEMS and NEMS Technologies
Другие ссылки: Journal of Microelectromechanical Systems (HTML)
OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information) (PDF)
OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information) (HTML)