Аннотация:A new method for height calibration of scanning probe microscopes (SPMs), applicable for any height from 0.3 nm to beyond 100 nm, is presented. A previously calibrated piezo is set in a SPM instead of a sample. A definite time-periodic elongation at a corresponding voltage can serve as height standard. The method is easy to use, tuneable in a wide range and exact to the limits of the SPM itself.
