Аннотация:A new production method for a large diameter microwave plasma is proposed without magnetic coils. An annular slot antenna and two ring-typed permanent magnets are used for the generation of high density plasma in the circumference of a chamber with the plasma confinement and diffusing to the central region. The optimum arrangement of components in the device is examined for the production of the large diameter uniform plasma. The almost uniform electron density of about 4×1010 cm−3 is realized, and the plasma with two electron temperatures is observed. The measurement with a directional ion energy analyzer reveals that ions are almost isotropic.
