Аннотация:We have analyzed the structure of tilted superlattices on atomically stepped surfaces by using atomic force microscopy to detect ridges of GaAs formed by the selective oxidation and removal of intervening AlAs regions. Oxides were removed in a liquid cell of the atomic force microscope while scanning. We have demonstrated plan views which reveal the superlattice length and width uniformity, but the method is also in principle suited for cross-sectional samples.
