Ion Etching as a Method to Optimize the Optoelectric Parameters of Transparent Conductive Structures In2O3/Ag/In2O3

Nedelin S.V.; Zolotovskii N.A.; Voronin A.S.; Simunin M.M.; Makeev M.O.; Lukyanenko A.V.; Tambasov I.A.

База данных: Каталог библиотеки СФУ

Аннотация: We investigated the optoelectric characteristics of transparent conducting structures of oxide/metal/oxide (OMO) type, where In<sub>2</sub>O<sub>3</sub> is used as an oxide and Ag is used as a metal. Samples were obtained by magnetron sputtering. The focus is on the influence of the thickness and homogeneity of the silver layer on the optical and electrical properties of the structures. We use an ion etching method to improve performance of silver thin films and reduce thickness. Usually, in the case of poor wetting of the metal oxide substrate, the thin film grows by the island mechanism (Volmer–Weber mechanism), which leads to poor properties of the OMO structures. The proposed method consists of “thinning” the obvious continuous silver films using ion etching, because of which the thin silver films become closer to the films growing by the layer-by-layer mechanism (Frank–van der Merwe mechanism). The results obtained showed that ion etching allows us to achieve higher transparency of the structure without crucial loosing of electrical conductivity. This makes the method promising for further application in optoelectronic devices such as solar cells and displays.

Год издания: 2024

Авторы: Nedelin S.V., Zolotovskii N.A., Voronin A.S., Simunin M.M., Makeev M.O., Lukyanenko A.V., Tambasov I.A.

Источник: Bulletin of the Russian Academy of Sciences: Physics

Экранирующие свойства оптически прозрачных тонкопленочных сэндвич-структур In2O3/Ag/In2O3 : научное издание

Неделин С. В. и др.
2025 год

Selective Laser Sintering of Silver Nanowires for Flexible Electronics Materials : статья из журнала

Bril I.I. и др.
2024 год

Broadband EMI Shielding Performance in Optically Transparent Flexible In2O3/Ag/In2O3 Thin Film… : научное издание

Voronin Anton и др.
2025 год

Auger Electron Spectroscopy of Thin Cr2GeC Films : научное издание

Andryushchenko T. A. и др.
2023 год

ИССЛЕДОВАНИЕ ЗОННОЙ СТРУКТУРЫ ТОНКИХ In2O3 ПЛЕНОК С ПОМОЩЬЮ РЕНТГЕНОВСКОЙ ФОТОЭЛЕКТРОННОЙ… : научное издание

Тамбасов И.А. и др.
2016 год

Composite materials obtained by the ion-plasma sputtering of metal compound coatings on polymer… : статья из журнала

Khlebnikov N. и др.
2016 год

Random Ag mesh transparent heater obtained with a cracked template technique : доклад, тезисы доклада, статья из…

Voronin A.S. и др.
2020 год

High performance hybrid rGO/Ag quasi-periodic mesh transparent electrodes for flexible… : статья из журнала

Voronin A.S. и др.
2016 год

Random Ag mesh transparent heater obtained with a cracked template technique : доклад, тезисы доклада

Voronin A.S. и др.
2020 год

Solar cell based on copper (I) oxide and cadmium tin oxide : статья из журнала

Shelovanova G.N. и др.
2016 год

Growth Process, Structure and Electronic Properties of Cr2GeC and Cr2-xMnxGeC Thin Films Prepared… : научное издание

Tarasov Anton S. и др.
2023 год

Plasma parameters and reactive-ion etching kinetics of ZnO in hydrogen bromide: the influence of… : статья из журнала

Efremov A. M. и др.
2024 год

TRANSPARENT HEATERS BASED ON THE COPPER MICROMESH PASSIVATED BY GRAF(PH)ENE OXIDE : научное издание

Voronin A.S. и др.
2018 год

IMPLEMENTATION OF MAGNETRON SPUTTERING METHOD IN OBTAINING A RADIO-ABSORBING THIN FILM BASED ON CoC : научное издание

Prokhorenkova N. V. и др.
2024 год

On the comparison of reactive-ion etching mechanisms for SiO[2] and Si[3]N[4] in HBr + Ar plasma : статья из журнала

Efremov A. M. и др.
2023 год

On effects of initial CF[4] + CHF[3] + O[2] mixture composition on plasma parameters and reactive… : статья из журнала

Efremov A. M. и др.
2025 год

Библиотечно-издательский комплекс СФУ

Ion Etching as a Method to Optimize the Optoelectric Parameters of Transparent Conductive Structures In2O3/Ag/In2O3
статья из журнала

Похожие публикации