Original concept of cracked template with controlled peeling of the cells perimeter for high performance transparent EMI shielding films : научное издание
Библиографическое описание:Original concept of cracked template with controlled peeling of the cells perimeter for high performance transparent EMI shielding films : научное издание / A. S. Voronin, Y. V. Fadeev, F. S. Ivanchenko [et al.]. - Текст : непосредственный // Surfaces and Interfaces. - 2023. - Т. 38, № . - P. 102793. - ISSN 2468-0230, DOI 10.1016/j.surfin.2023.102793.
Аннотация:The problem of sputtering of thick metal films on micro and nanotemplates is important for obtaining mesh transparent conductors with excellent optoelectric characteristics. In this work, we demonstrate for the first time the possibility of controlling the degree of peeling of the cell perimeter from the substrate for a cracked template based on egg white by alternating the operations of moistening the template with saturated water vapor and shock drying with hot air. Local peeling of the cracked template cells perimeter makes it possible to increase the thickness of the metal sputtered on the cracked template by more than 1 µm, which is not achievable for other lithographic approaches. Our technique was used to obtain thick Ag meshes with a low sheet resistance of no more than 1.59 Ω/sq and a transparency of about 89.1%. The thick Ag meshes show a shielding efficiency (SE) of 49 dB or 99.998% of the incident power of an electromagnetic wave at a frequency of 1 GHz. In a sandwich geometry, thick Ag meshes, which simulates a real shielding window, the shielding efficiency (SE) reaches 71 dB with a transparency of more than 80%.
Держатель оригинала документа:Bauman Moscow State Technical University, Moscow Russia 105005, Federal Research Center «Krasnoyarsk Scientific Center, Siberian Branch, Russian Academy of Sciences» (FRC KSC SB RAS), Krasnoyarsk, Russia 660036, Kirensky Institute of Physics, Siberian Branch, Russian Academy of Sciences, Krasnoyarsk Russia 660036, LLC Research and Production Company "Spectehnauka", Krasnoyarsk, Russia 660043, N.N. Semenov Federal Research Center of Chemical Physics of Russian Academy of Sciences, Moscow, Russia 119334, Reshetnev Siberian University Science and Technology, Krasnoyarsk, Russia 660037, Siberian Federal University, Krasnoyarsk, Russia 660041, Tomsk Polytechnic University, Tomsk, Russia 634050, V.E. Zuev Institute of Atmospheric Optics, Siberian Branch, Russian Academy of Sciences, Tomsk, Russia 634055
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