The formation of structural imperfections in semiconductor silicon / : библиография
Цифровые и тематические книжные коллекции издания
Содержание
- Chapter one. Growth of dislocation-free silicon single crystals from melt and defect formation
- Chapter two. Physical modeling of defect formation processes in dislocation-free single crystals of silicon
- Chapter three. Physical basis of a heterogenous (two-stage) model of grown-in microdefect formation
- Chapter four. High-temperature precipitation of impurity in dislocation-free silicon single crystals
- Chapter five. The formation of microvoids and interstitial dislocation loops during crystal cooling after growing
- Chapter six. General approach to the engineering of defects in semiconductor silicon.
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