Microstereolithography is a new microfabrication process that evolved from the rapid prototyping industry. The first developments in this technology started in 1993 and different research teams around the world have developed microstereolithography machines since. All are based on the manufacturing of parts by a light-induced layer-stacking technique, but different approaches have been followed. This paper reviews the major microstereolithography processes developed until now, and presents the components they produced. Microstereolithography is able to create complex microobjects having real 3D shapes, which can be useful in the fields of microrobotics, microfluidics or microsystems. Although most research teams involved in the microstereolithography field have investigated its use as a microfabrication technique, the most promising application field of this technology is nevertheless the rapid prototyping domain that faces an increasing demand of small-size high-resolution prototype parts.